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Vacuum turbo molecular pump
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The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove, or a combination of the two. The gas molecules enter the turbo molecular pump and collide with the surface of the rotors creating kinetic energy causing the gas molecules to move toward the turbomolecular pump exhaust.
SiDoLim TEP's turbomolecular pumps offer full magnetic levitation rotor, which provides for a clean, reliable vacuum for today's semiconductor and solar industries. The TEP Series turbomolecular pumps feature a five axis magnetic bearing and half rack controller requiring no tuning or battery backup.
The TEP Series offers two major types of turbomolecular pumps - high compression, and corrosion resistant.
The TEP Series offers five major types of turbomolecular pumps - temperature controlled corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum.
Compound Molecular Pump TEP 250/1600E
Model | TEP 250/1600E |
Pumping speed(l/s) | 1600 |
Compression ration | N2: 108; H2: 5×103 |
Ultimate pressure(Pa) | less than 1×10-6 |
Rotational speed (rpm) | 27000 |
Run-up time (min) | less than 8 |
Bearings | Ceramic ball bearings |
Fore line flange | KF50(DN50 ISO-KF) |
Inlet flange | LF250(DN250 ISO-K) |
Vibration value((mm)) | less than 0.1 |
Recommended backing pump(l/s) | 15 |
Cooling water | temperature less than 25 °C flow rate more than 60 l/h |
Bake-out temperature | less than 100°C at pump shell |
Ambient temperature (°C) | 5-40 |
Oil charge quantity(ml) | 150 |
Mounting position | Vertical±5° |
Weight (kg) | 47 |
Vacuum turbo molecular pump
