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- Contact Person : Mr. Dan Andrew
- Company Name : Beijing Shengtianjiayuan Technology Inc.
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Vacuum turbo molecular pump
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The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove, or a combination of the two. The gas molecules enter the turbo molecular pump and collide with the surface of the rotors creating kinetic energy causing the gas molecules to move toward the turbomolecular pump exhaust.
SiDoLim TEP's turbomolecular pumps offer full magnetic levitation rotor, which provides for a clean, reliable vacuum for today's semiconductor and solar industries. The TEP Series turbomolecular pumps feature a five axis magnetic bearing and half rack controller requiring no tuning or battery backup.
The TEP Series offers two major types of turbomolecular pumps - high compression, and corrosion resistant.
The TEP Series offers five major types of turbomolecular pumps - temperature controlled corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum.
Turbomolecular Pump TEP 100/110
110 series molecular pump unit is a clean and ultra-high vacuum acquisition equipment with type TEP 100/110 series performance turbo molecular pump, mechanical fore-pump, cutoff vent valve, backing line, molecular pump power pack, control power pack etc. assembled on the stand. It provides convenient installation, simple operation, easy connection, reliable performance, and is widely used in surface analysis, accelerator technique, semi-conductive devices, plasma technique, manufacturing of electro-vacuum elements and vacuum technique etc.
Part Number | TEP 100/110LF | TEP 100/110CF |
Pump Type | Turbo | Turbo |
Inlet Flange | ISO-100 | CF-100 |
Outlet Flange | ISO-25 | ISO-25 |
Pumping Speed(Air )(l/s) | 110 | 110 |
Pressure for Max Speed(torr) | 7.5×10-4 | 7.5×10-4 |
Rotation Speed(RPM) | 42,300 | 42,300 |
H2 Compression Ratio | 5×102 | 5×102 |
N2 Compression Ratio | 1×108 | 1×108 |
Ultimate Vacuum(torr) | 4.5×10-8 | 4.5×10-9 |
Run up time(min) | <2 | <2 |
Control Unit | FD-110A | FD-110A |
Input Voltage(VAC) | 220/110±10% | 220/110±10% |
Cooling water(GPM) | >0.5 | >0.5 |
Bearing type | Ceramic | Ceramic |
Lubrication | Oil | Oil |
Operating Orientation | Vertical or Horizontal | Vertical or Horizontal |
Weight(lb/kg) | 18/8 | 18/8 |
Vacuum turbo molecular pump
