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- Contact Person : Mr. Dan Andrew
- Company Name : Beijing Shengtianjiayuan Technology Inc.
- Tel : 0086-10-82416475
- Fax : 0086-10-58948658
- Address : ,,MBJ2638,RM1007,10/F., HO KING COMM. CTR., NO. 2-16 FA YUAN STREET, MONGKOK, HONG KONG
- Country/Region : China
Vacuum turbo molecular pump
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The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove, or a combination of the two. The gas molecules enter the turbo molecular pump and collide with the surface of the rotors creating kinetic energy causing the gas molecules to move toward the turbomolecular pump exhaust.
SiDoLim TEP's turbomolecular pumps offer full magnetic levitation rotor, which provides for a clean, reliable vacuum for today's semiconductor and solar industries. The TEP Series turbomolecular pumps feature a five axis magnetic bearing and half rack controller requiring no tuning or battery backup.
The TEP Series offers two major types of turbomolecular pumps - high compression, and corrosion resistant.
The TEP Series offers five major types of turbomolecular pumps - temperature controlled corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum.
Compound Molecular Pump TEP 700
Part Number | TEP 700E-LF | TEP 700E-CF |
Pump Type | Drag | Drag |
Inlet Flange | ISO-160 | ISO-160 |
Outlet Flange | ISO-40 | ISO-40 |
Pumping Speed(Air )(l/s) | 700 | 700 |
Pressure for Max Speed(torr) | 7.5×10-3 | 7.5×10-3 |
Rotation Speed(RPM) | 36,000 | 36,000 |
H2 Compression Ratio | 6×106 | 6×106 |
N2 Compression Ratio | 1×109 | 1×109 |
Ultimate Vacuum(torr) | 4.5×10-9 | 4.5×10-10 |
Run up time(min) | <4 | <4 |
Control Unit | FD-700K | FD-700K |
Input Voltage(VAC) | 220/110±10% | 220/110±10% |
Cooling water(GPM) | >0.5 | >0.5 |
Bearing type | Ceramic | Ceramic |
Lubrication | Grease | Grease |
Operating Orientation | Any | Any |
Weight(lb/kg) | 42/19 | 42/19 |
Vacuum turbo molecular pump
