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Contact Person : Mr. Dan Andrew
Company Name : Beijing Shengtianjiayuan Technology Inc.
Tel : 0086-10-82416475
Fax : 0086-10-58948658
Address : ,,MBJ2638,RM1007,10/F., HO KING COMM. CTR., NO. 2-16 FA YUAN STREET, MONGKOK, HONG KONG
Country/Region : China

magnetron sputtering coating machine

Product Detailed

.This equipment is mainly used to develop nano-scale conductive film, semiconductor film, insulating film, as well as nickel

magnetron sputtering coating machine SG100

(2 inch substrate / magnetron sputtering + evaporation (option)

The equipment is small size, light weight, cheap price and its cost to use is low. The device is matched with a circular flattarget and one pair of evaporation electrode, which can be used in magnetron sputtering and evaporation. This equipment is mainly used to develop nano-scale conductive film, semiconductor film, insulating film, as well as nickel, cobalt and other magnetic materials. Moreover, it can achieve substrate anti-splash cleaning by adding a negative bias on substrate. It’s a cheap tailor-made experimental device designed for the universities, colleges and research institutions.

Main Technical Specifications

Vacuum chamber	φ220mm×H300mm [the user can customize the vacuum chamber size]
Vacuum system	Turbo-molecular pump + Direct-connection sliding vane rotary vacuum pump, electric vacuum valve, Digital composite vacuum gauge
Ultimate vacuum	Better than 8.0×10-5Pa
Pumping speed	Pumped from the atmosphere to 6.0 × 10-3Pa ≤ 15min
Size of coating film	One 2-inch sample and a number of loose tablets
Substrate heating and rotation	Substrate heating: normal temperature ~ 400 °C, automatic measurement, PID temperature control; substrate rotation :0-20 r / min, adjustable and controllable
Sputtering target specifications	A 2-inch circular flattarget and reserve one pair of evaporation electrode interface
Non-uniformity of film thickness	≤±5%
Control	Manual control
Alarm and protection	It alarms in time and executes appropriate protection measures when abnormal situations, such as water shortage, over-current, over-voltage and open circuit, happen on pumps, targets and electrodes.
Size	L × W: 1300 × 800mm

magnetron sputtering coating machine

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magnetron sputtering coating machine